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How to contact a silicon substrate?

Question asked by DEPAOLA on Dec 12, 2007
Latest reply on Sep 12, 2017 by engrvip
Hi All!
is it possible to somehow contact a dielectric (e.g. the bulk silicon ) in order to account to the presence of substrate contacts?
To facilitate: I would to implement the following layer stack

SiOx -- VIA hole --

I guess there should be some trick since the silicon (defined as a dielectric layer) cannot be directly contacted without a metal stripe. However, it is sometimes useful to account the fact that substrate grounding is often provided by means of substrate contacts rather than by an infinite ground plane on the back of the chip. I hope I was clear enough.
Thank you for the help