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SOLT calibration on die?

Question asked by shawn_y on Dec 18, 2011
Latest reply on Mar 12, 2012 by Dr_joel
Dear experts,

I am thinking about whether it is possible to move my reference plane to a place inside silicon (CMOS devices).  In other words, can I build a short, open, load and through inside silicon, and use them as my SOLT calibration kit?  I know this won't give me the dynamic range compared to standard calibration procedures, but I am willing to sacrifice my accuracy.   The open/short/through won't be ideal but I think the parasitic will be small since the size of the CMOS SOLT circuit will be tiny. The load may be hard since it is not easy to manufacture a precise broadband 50ohm load (maybe it will be 49 ohm with 0.5pf shunt capacitance). 

Not sure anybody has done something similar? Or any advice whether this approach is feasible? How bad my calibration will be if my load is not ideal (e.g., it is 49ohm with 0.5pf shunt capacitance instead)?

thank you very much in advance for your help!