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3-ports calibration with probe and Iss

Question asked by DanielZhao on May 3, 2011
Latest reply on May 12, 2011 by DanielZhao
We try to calibrate on wafer with a single ended input probe (SUSS Z-probe, GSG, port1) and a differential output probe (SUSS dual-Z-probe,GSGSG, port 2 & 3) with the same pitch(150um), and we have the calibration substrate SUSS CSR-8(for GSG structure) and SUSS CSR-31(for GSGSG structure), but we don't have WinCal  software, so we want know how to finish the 3-ports calibration procedure with the tools above-mentioned use VNA directly.

Is there anyone who has a solution for this problem?

Thanks in advance

Daniel Zhao(My e-mail: soleman_@126.com)

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