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Vector noise measurement on wafer

Question asked by ecasida on Mar 4, 2011
Latest reply on Mar 7, 2011 by Dr_joel
The app note 5990-5800EN "High Accuracy Noise Figure Measurements using PNA-X" has a few pages describing on wafer calibration for vector noise measurement.  It seems to indicate that the procedure would include doing an on wafer calibration for S-parameters.  I would like to do a TRL on wafer cal.  But it's not clear to me how to do this.

I would think that I could select my on wafer cal kit in the Select DUT connectors and Cal Kits dialog, but my cal kit doesn't show up here.

Is there a write up on how to do this?

I tried doing a coaxial calibration using ecal modules, and then applying fixture de-embedding on port one and two.  This seems to work, but the Noise Figure FAQ (maybe out of date?) says that de-embedding doesn't work on noise figure measurements:
http://www.home.agilent.com/agilent/edi ... =eng&cc=US

What is the right way to do this?

-Eric  

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