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on wafer 3-port calibration with multiport E8364B

Question asked by davevangoor on Jan 16, 2007
Latest reply on Jan 16, 2007 by dgun
When I try to calibrate on wafer with a single ended infinity input probe (GSG, port1) and a differential output probe (GSGSG, port 2 & 3) with the same pitch, and use wincal 2006 for 3-port calibration, and use the standard substrate 129-139 then an error is produced during the validation measuring the OPEN structure. The S22 is not correct.
For this reason the calibration procedure cannot finish. When we try to circumvent this by sending the calibration data directly it does not work.

Is there anyone who has a solution for this problem?

Thanks in advance

Dave van Goor