LCR Meter is showing Overload on turn on, with no testing leads nor DUT attached (OPEN), DC bias is OFF. I reduced the AC level (50mV) and set Rp-Gp model and the displayed measurement shows large capacitance and very high conductance. AC current value is in the order of 2uA, which I find abnormally high. All corrections are turned off. Can this be an insulation damage on the input? If so, how could have this damage been done? ESD? We've only measured small area MOS capacitors before this problem started.
Precision RLC Meter Model E4980A Firmaware version A.06.15